Patterned Wafer Defect Inspection:
 · KLA-Tencor 2132 - 100mm-200mm
 · KLA-Tencor 2133 - 100mm-200mm
 · KLA-Tencor 2135 - 100mm-200mm
 · KLA-Tencor 2138 - 100mm-200mm
 · KLA-Tencor 2139 - 100mm-200mm UV
 · KLA-Tencor 2401 Viper - 200mm Macro (Brightfiled/Darkfield)

Patterned Wafer Surface Defect Inspection: 
 · KLA-Tencor AIT-XP -200mm-300mm

Non-Patterned Wafer Surface Particle Measurment:
 · KLA-Tencor 6220 - 100mm-200mm
 
Patterned Wafer UV Film Thickness Measurment:
 · KLA-Tencor (Prometrix) UV1270SE - 100mm-200mm SMIF
 · KLA-Tencor (Prometrix) UV1280SE - 100mm-200mm
 · KLA-Tencor F5 - 200mm-300mm
 · KLA-Tencor Thermawave Opti-Probe 5340C - 200mm-300mm
 · Nanometrics NanoSpec 9300 - 300mm
 
Other:
 · SDI MC/PDM - 300mm Plasma Damage & Contamination Analysis
 · MDC CSM/2-VF6 (Materials Development Corporation) - 200mm CV Plotter