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| Atmospheric Top Mount 3-axis |
| Brooks PRI Equipe ATM107 Robot |
| - One or Two Vacuum Lines (for Single/Dual End-Effectors) |
| - HAMA Wafer Sensor Option |
| - "SEMI S2-93" Standard Option |
| - 7.2" Arm Link w/ 7.1" Z-Stroke |
| - "B" Series (Wide Arm) available |
| Repair & Refurbishment Services available for this model. |
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