Process & Metrology Semiconductor EquipmentAsyst ISOPORT Brewer Scientific CEE 100FX - Spin Coater Crest Ultrasonics Rigibot CTS-1000 GaSonics Aura 1000 - Photoresist Asher (Stripper) Gardner Denver Integra - Rotary Screw Compressor GSI Lumonics Lasermark 960 - Laser (Scribe) Marking System JEOL JWS-7505 - Review SEM KLA-Tencor 2132 - Overlay Defect InspectionKLA-Tencor 2133 - Overlay Defect InspectionKLA-Tencor P11 - Surface ProfilerKLA-Tencor Prometrix RS-55 - Surface ResisitivityMicroHandling MH250 - Gravity Test Handler Rudolph AutoEl III - Film Thickness Measurement Rudolph FTM - Film Thickness Measurement Tabai Espec IPH-200 - Oven Tabai Espec TSV-40HT - Oven TecHarmonic EHTVS - Dual Vortex Scrubber TecHarmonic HTVS - Venturi ScrubberThermal Technology Meltmaster - Arc Melt FurnaceThermaWave Opti-Probe 5340C - Thin Film MeasurmentThermodynamic VL-32-27 - OvenThermotron F-82-CHV-25-25VWR Scientific 1410
Metrology: · JEOL JWS-7505 - Review SEM