Equipment

         Process & Metrology Semiconductor EquipmentAsyst ISOPORT
Brewer Scientific CEE 100FX - Spin Coater
Crest Ultrasonics Rigibot CTS-1000
GaSonics Aura 1000 - Photoresist Asher (Stripper)
Gardner Denver Integra - Rotary Screw Compressor
GSI Lumonics Lasermark 960 - Laser (Scribe) Marking System
JEOL JWS-7505 - Review SEM
KLA-Tencor 2132 - Overlay Defect InspectionKLA-Tencor 2133 - Overlay Defect InspectionKLA-Tencor P11 - Surface ProfilerKLA-Tencor Prometrix RS-55 - Surface ResisitivityMicroHandling MH250 - Gravity Test Handler
Rudolph AutoEl III - Film Thickness Measurement
Rudolph FTM - Film Thickness Measurement
Tabai Espec IPH-200 - Oven
Tabai Espec TSV-40HT - Oven
TecHarmonic EHTVS - Dual Vortex Scrubber
TecHarmonic HTVS - Venturi ScrubberThermal Technology Meltmaster - Arc Melt FurnaceThermaWave Opti-Probe 5340C - Thin Film MeasurmentThermodynamic VL-32-27 - OvenThermotron F-82-CHV-25-25VWR Scientific 1410

Metrology: 
 · JEOL JWS-7505 - Review SEM
 · KLA-Tencor 2132 - Overlay Surface Inspection
 · KLA-Tencor 2133 - Overlay Surface Inspection
 · KLA-Tencor P11 - Surface Profiler
 · KLA-Tencor Prometrix RS-35 - Surface Resistivity
 · KLA-Tencor Prometrix RS-55 - Surface Resistivity
 · Rudolph AutoEl III - Film Thickness Measurement
 · Rudolph FTM - Film Thickness Measurement