Metrology: 
 · KLA-Tencor 2132 - Overlay Surface Inspection
 · KLA-Tencor 2133 - Overlay Surface Inspection
 · KLA-Tencor HRP-200 - High Resolution Surface Profiler
 · KLA-Tencor SP1 Classic - 200mm-300mm Non-Patterned Particle Measurement 
 · KLA-Tencor Thermawave Opti-Probe 5340C - Thin Film Measurement

Process Equipment (FRONT-END):
 · CREST Ultrasonics Rigibot CTS-1000- 5-station Automated Wet Bench
 · GSI Lumonics Lasermark 968 - Laser (Scribe) Marking System

Process (& Test) Equipment (BACK-END):
 · Dynatex DX-III - Wafer Scribe & Break System

Lab/Misc. Equipment:
 · Isolation Tables
 · Thermal Technology Meltmaster - High-Purity Vacuum Arc Melt Furnace

Facilities:
 · Gardner Denver Integra - Rotary Screw Compressor
 · Mykrolis (Entegris) Aeronex Infinity GPS-4 Z-Series - CDA Gas Purification
 · Chillers
 · Vacuum Pumps

Wafer Handling & Modules:
 · Asyst SMIF-300FL FrontLoaders S2 / S3 / ISOPORT
 · Asyst Spares & Accessories
 · PRI Equipe Brooks Robots & Controllers 
 · PRI Equipe Brooks Tracks
 · PRI Equipe Brooks Pre-aligners