Equipment

         Process & Metrology Semiconductor EquipmentAeronex Infinity CDA PurifierAsyst ISOPORT
Brewer Scientific CEE 100FX - Spin Coater
GaSonics Aura 1000 - Photoresist Asher (Stripper)
Gardner Denver Integra - Rotary Screw Compressor
GSI Lumonics Lasermark 960 - Laser (Scribe) Marking System
KLA-Tencor 2132 - Overlay Defect InspectionKLA-Tencor 2133 - Overlay Defect InspectionKLA-Tencor P11 - Surface ProfilerKLA-Tencor HRP-200 - High Resolution Surface ProfilerKLA-Tencor SP1 - 300mm Bare-Wafer Particle MeasurementKLA-Tencor ThermaWave Opti-Probe 5340C - Thin Film Measurment
Tabai Espec IPH-200 - Oven
Tabai Espec TSV-40HT - OvenThermal Technology Meltmaster - Arc Melt FurnaceThermodynamic VL-32-27 - OvenThermotron F-82-CHV-25-25VWR Scientific 1410

Metrology: 
 · KLA-Tencor 2132 - Overlay Surface Inspection
 · KLA-Tencor 2133 - Overlay Surface Inspection
 · KLA-Tencor P11 - Surface Profiler
 · KLA-Tencor HRP-200 - High Resolution Surface Profiler
 · KLA-Tencor SP1 Classic - 200mm-300mm Non-Patterned Particle Measurement 
 · KLA-Tencor Thermawave Opti-Probe 5340C - Thin Film Measurement

Process Equipment (FRONT-END):
 · Brewer Science CEE 100FX - Spin Coater
 · GaSonics A1000 (Aura 1000) - Photoresist Asher (Stripper)
 · GSI Lumonics Lasermark 968 - Laser (Scribe) Marking System
 · Ovens

Process (& Test) Equipment (BACK-END):
· Ovens

Lab/Misc. Equipment:
 · Isolation Tables
 · CREST Ultrasonics - Automated De-greaser Sink
 · Ovens
 · Thermal Technology Meltmaster - High-Purity Vacuum Arc Melt Furnace

Facilities:
 · Gardner Denver Integra - Rotary Screw Compressor
 · Mykrolis (Entegris) Aeronex Infinity GPS-4 Z-Series - CDA Gas Purification
 · Chillers
 · Vacuum Pumps

Wafer Handling & Modules:
 · Asyst SMIF-300FL FrontLoaders S2 / S3 / ISOPORT
 · Asyst Spares & Accessories
 · PRI Equipe Brooks Robots & Controllers 
 · PRI Equipe Brooks Tracks
 · PRI Equipe Brooks Pre-aligners