Parts 
 

                     

Semiconductor Equipment Parts:
• Applied Materials Trazar RF Generator
• FSI Parts
• JEOL Parts
• KLA-Tencor Parts
• Prometrix Parts
• Therma-wave Parts

Semiconductor Equipment Automation:
• PRI Equipe Brooks Robots
• PRI Equipe Brooks Controllers
• PRI Equipe Brooks Pre-Aligners
• PRI Equipe Brooks Linear Tracks
• Brooks Automation ATR8 Reliance Robots
• Brooks Automation Series 8 Robot Controllers
• Brooks Automation Acculigner Pre-Aligners
• Brooks Automation AcuTrav Tracks
• Brooks Yaskawa Robots
• Brooks Yaskawa Controllers
• Brooks Yaskawa Pre-Aligners
• Brooks Yaskawa Tracks
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• PRI Equipe Brooks Robot Accessories
• Misc. Robots & Controllers
• Asyst Parts & Accessories

 
 

 

VLSI & Misc. Calibration Standards:
 • Duke Scientific PSL Liquid
• Step-Height
• Film Thickness
• Non-Contact & FPP Resistivity
• Surface Flatness
• Test Grade Bare Si
• Masks
• Other Misc.

 

™

Yaskawa Brooks Automation is a Registered Trademark of
Brooks Automation, Inc., and Yaskawa Brooks Automation, Inc.

AERA is a Registered Trademark of Advanced Energy Industries, Inc.
Millipore is a Registered Trademark of Millipore Corp.
UNIT is a Registered Trademark of Celerity Inc.

Trazar is a Registered Trademark of Trazar Inc
.

DC/RF Power Generators, Peripherals, & Parts:
• Advanced Energy
• ENI
• Huttinger
• Lambda
• Trazar Parts

Mass Flow Controllers (MFC):
• Aalborg MFC
• Brooks MFC
• Millipore MFC
• MKS MFC
• Mykrolis MFC
• STEC MFC

Electronics:
• Sony High Resolution Monitors
• MATROX Imaging Products
• COGNEX Imaging Products
• High Resolution Cameras

Optics:
• Objective Lenses
• Melles Griot
• Vibration Isolation
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