KLA 2133 (Upgraded from 2131)
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- Patterned Wafer Overlay Inspection Tool
- Vintage: 1995
- Able to communicate with KLA 2552
- Currently set up for 8" wafers
- 4", 5" & 6" wafer capable
- Sensitivity >0.25µm pixels
- Doubled scan speed when at 0.62pixels
- Segmented Auto Threshold (SAT)
- 8" DSW calibration wafer included
- Power Line Conditioner Included
- Machine pictured is not of actual tool for sale

- Available Operational-Calibrated or Refurbished
- Preventive Maintenance Contract Available
- Installation Service Available