Current Refurbishment Process:
(CE compliance is available.)
1.  CHAMBER refurbished to OEM specifications.
      - Correct reflectivity & anodization specifications used.
2.  WAFER HANDLING refurbished.
      - Anything in contact with production wafers are re-surfaced & re-anodized.
3.  WAVEGUIDE rebuilt to latest revision OEM specifications. 
      - Over time, the internal surface of the waveguide can corrode and start arcing
         to ground.  Rebuilding it will extend its longevity.
      - GaSonics waveguides have gone through numerous revisions, be sure you get
         the latest for the best performance.
4.  All CONSUMABLE items replaced new.
      - O-rings, ceramics, magnetron, etc.
5.  Outer COVERS cosmetically fixed.
      - Stripped & re-painted with particle-free paint.
6.  All ELECTRONICS are thoroughly tested for full functionality.
      - CPU board with SECSII communication.
      - Display boards.
      - I/O board for safety interlocks.
      - Temperature controller.
      - 50/60Hz conversions by request.
7.  Tool CALIBRATED.
     (MW tuning must be performed using end-user's recipe.)
     (MFC parameters must be adjusted using end-user's gases.)
      - Wafer handling adjusted to OEM specifications.
      - MFCs & Baratron cleaned & re-calibrated.
      - MKS throttle valve & controller re-calibrated.