| |
(CE compliance is available.)
1. CHAMBER refurbished to OEM specifications.
- Correct reflectivity & anodization specifications used.
2. WAFER HANDLING refurbished.
- Complete arm assemblies taken apart to be re-surfaced & re-anodized.
- Elevators taken apart and serviced with major parts re-anodized and all gears
properly lubricated.
- All linear bearings replaced.
- All air cylinders replaced.
- Nest sandblasted and re-anodized.
- Wafer pins replaced.
- Wafer size conversions from 3" to 6" performed.
3. WAVEGUIDE rebuilt to latest revision OEM specifications.
- Over time, the internal surface of the waveguide can corrode and start arcing
to ground. Rebuilding it will extend its longevity.
- GaSonics waveguides have gone through numerous revisions, be sure you get
the latest for the best performance.
- Plasma-detection port installed by request, if not already present.
4. All CONSUMABLE items replaced new.
- Quartz, lamps, o-rings, magnetron, etc.
5. Outer COVERS cosmetically fixed (or replaced if requested).
- Stripped & re-painted with particle-free paint.
- Stainless steel covers (Intel) polished.
6. All ELECTRONICS are thoroughly tested for full functionality.
- CPU board with SECSII communication.
- Display board. (Can only attempt to fix the "UTO" problem. This was fixed
by a later revision display.)
- I/O board for safety interlocks.
- EOP assy. for end point detection.
- Lamp & plama-fail detection boards (if present).
- 50/60Hz conversions by request.
7. Tool CALIBRATED.
(MW tuning must be performed using end-user's recipe.)
(MFC parameters must be adjusted using end-user's gases.)
- Wafer handling adjusted to OEM specifications.
- MFCs & Baratron cleaned & re-calibrated.
- MKS throttle valve & controller re-calibrated.
8. Additional OPTIONS available.
- Pressure Control. Includes MKS baratron, throttle valve, cables, & controller.
- Plasma/Lamp Fail Detection.
VIEW OUR CURRENT GaSonics Aura 1000 INVENTORY
|
 |
