Parts < UNIT MFCs   REQUEST A QUOTE: e-mail sales@gSEMI.com
 
 
Model No.
Gas
Range
 Qty.
    
UNIT UFC-1100A
 
N2
 
2SLM
 
 1
   
UNIT UFC-3165
 
N2
 
100SLM
 
 1
 
UNIT UFC-1660M
 
C2HF5
 
50SCCM
 
3
Flush Mount
 
UNIT UFC-1660M
 
C3H2F6
 
100SCCM
 
 9
Flush Mount
 
UNIT UFC-1660M
 
C4F6
 
50SCCM
 
 2
Flush Mount
 
UNIT 1662 -100083
 
BF3
 
5SCCM
 
 1
   
UNIT 1665 -100088
 
N2
 
3SLM
 
 4
   
UNIT UFM-3165
 
N2
 
50SLM
 
 2
 
UNIT UFC- 8161 -100400
 
N2
 
20SLM
 
1
Flush Mount
 
UNIT UFC- 8161 -100401
 
N2
 
1SLM
 
1
Flush Mount
 
UNIT 8165 -100347
 
N2
 
50SLM
 
 1
 
UNIT 8565 -100120
 
NH3
 
20SLM
 
 1
 
UNIT 8565 -100359
 
HE
 
30SLM
 
 1
 
UNIT UFC-1662M
 
BF3
 
2SCCM
 
 2
 
UNIT UFC-1662M
 
BF3
 
2SCCM
 
 3
    
UNIT UFC-1662M
 
BF3
 
2SCCM
 
 4
    
UNIT UFC-1662M
 
BF3
 
2SCCM
 
5
    
UNIT UFC-1665M
 
ARGON
 
50SCCM
 
 1
    
UNIT UFC-1665M
 
ARGON
 
100SCCM
 
 2
    
UNIT UFC-1665M
 
C6H18SI2O
 
200SCCM
 
 2
    
UNIT UFC-1665M
 
C6H18SI2O
 
50SCCM
 
 2
    
UNIT UFC-1665M
 
O2
 
5000SCCM
 
 1
    
UNIT UFC-1665M
 
O2
 
2SLM
 
 2
    
UNIT UFC-1665M
 
TICL4
 
50SCCM
 
 1
    
UNIT UFC-1665M
 
TICL4
 
20SCCM
 
 2
    
UNIT UFC-8564
 
PH3
 
200SCCM
 
 2
    
UNIT UFC-8165M
 
HE
 
20SLM
 
 1
       
UNIT UFC-8165M
 
HE
 
50SLM
 
 1
       
UNIT UFC-8561
 
HE
 
15SLM
 
 1
    
UNIT UFC-8561
 
N2
 
25SLM
 
 1
    
UNIT UFC-8561
 
N2O
 
15SLM
 
 1
   
       
   
       
   
(list of latest MFCs)            
             
             
 
             
             
             
       
gSEMI Copyright 2008· All Rights Reserved