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Model No.
Gas
Range
 Qty.   
Mykrolis DSNAF101MG00
 
NF3
 
50SCCM
 
1
 
Mykrolis DSRAF101H900
 
O2
 
500SCCM
 
2
 
Mykrolis DSSAF101GB00
 
HE
 
2000SCCM
 
1
 
Mykrolis DSSAF101GE00
 
CF4
 
500SCCM
 
1
 
Mykrolis DSSAF101LK00
 
N2
 
2000SCCM
 
1
       
       
       
   
 
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