| |
 |
| |
|
|
|
Wafer Handling Upgrade see HIGH BANDWIDTH VIDEO |
| |
|
|
|
| |
1. Proven Reliability |
|
3-axis ATM-104 or ATM-105 robot replaces the original |
| |
|
|
primitive wafer handling system. The immediate effect is: |
| |
|
|
- Less Wafer Breakage ( 3-servo motors vs. ~18 "moving parts" ) |
| |
|
|
- Less Wafer Scratching see SURFACE SCANS |
| |
|
|
|
| |
2. Higher Throughput |
|
Transfer speed over 50% faster than original configuration |
| |
|
|
|
| |
3. Increase MTBF |
|
Over 70% of alarms are ELIMINATED see PARETO CHARTS |
| |
|
|
|
| |
4. Easier Maintenance |
|
Chamber access through one silicone seal vs. the normal |
| |
|
|
five (which includes the Chemraz o-rings). |
| |
|
|
|
| |
|
|
|
| II. |
CLTC Upgrade (Closed Loop Temperature Control) - Contact Thermocouple |
| |
|
|
|
| |
1. Better Uniformity |
|
For Process and Descum. |
| |
|
|
|
| |
2. Increased Ash Rate |
|
Reaches process temperature much faster. |
| |
|
|
Temperature kept constant. |
| |
|
|
|
| |
3. Metal Processing |
|
"No Fear" processing of Metals due to closed-loop control. |
| |
|
|
|
