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Wafer Handling Upgrade see HIGH BANDWIDTH VIDEO |
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1. Proven Reliability |
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3-axis ATM-104 or ATM-105 robot replaces the original |
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primitive wafer handling system. The immediate effect is: |
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- Less Wafer Breakage ( 3-servo motors vs. ~18 "moving parts" ) |
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- Less Wafer Scratching see SURFACE SCANS |
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2. Higher Throughput |
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Transfer speed over 50% faster than original configuration |
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3. Increase MTBF |
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Over 70% of alarms are ELIMINATED see PARETO CHARTS |
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4. Easier Maintenance |
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Chamber access through one silicone seal vs. the normal |
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five (which includes the Chemraz o-rings). |
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| II. |
CLTC Upgrade (Closed Loop Temperature Control) - Contact Thermocouple |
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1. Better Uniformity |
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For Process and Descum. |
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2. Increased Ash Rate |
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Reaches process temperature much faster. |
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Temperature kept constant. |
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3. Metal Processing |
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"No Fear" processing of Metals due to closed-loop control. |
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