< Back to Upgrade  
 
 
 


Atmospheric Top Mount 3-axis Robot
 
- One Vacuum Line
- HAMA Wafer Sensor Option
- "SEMI S2-93" Standard Option
- 5.25" Arm Link w/ 7.1" Z-Stroke
 
 
 
Click on image for larger picture...
 
gSEMI Copyright 2008· All Rights Reserved