GaSonics A1000 (Aura 1000) Asher
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- Photoresist Asher (Stripper)
- 3" to 6" wafers
- Strip rate >2 micron/minute
- MKS Pressure Control (Type 252A-1 w/ 253A Throttle)
- Plasma & Lamp Failure Detection
- Endpoint Detection
- ONLY available with wafer handling UPGRADED