GaSonics A1000 (Aura 1000) Asher
____________
- Photoresist Asher (Stripper)
- 3" to 6" wafers
- Strip rate >2 micron/minute
- MKS Pressure Control (Type 252A-1 w/ 253A Throttle)
- Plasma & Lamp Failure Detection
- Endpoint Detection
- Available with wafer handling UPGRADED