KLA-Tencor SP1 Classic
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- High Resolution Non-Patterned Surface Particle Measurement
- 150wph/200mm & 100wph/300mm Throughput/Wafer
- 0.08µm sensitivity on well-polished Silicon @95% capture
  probability with a false count less than or equal to 1 per
  measurement.
- High Resolution Haze sensitivity at Parts Per Billion
- Edge Exclusion down to 1mm
- Single cassette Brooks robot handler w/ pre-aligner
- Windows NT OS
- Full Calibration and Installation Services available