Rudolph FTM
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- Film Thickness Measurement
- Interferometry based-measurement tool
- Thickness Range 3KÅ to 40KÅ
- 10Å resolution
- Refractive Index Range 1.0 to 9.999
- 6" wafer compatible
- 4", 5", & 6" mask compatible
- 4 seconds per measurement
- Non contact