KLA-Tencor HRP-200 High Resolution Profiler
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- High Resolution Surface Profiler
- Characterization of CMP and other complex surfaces
- 2 cassette H2 handler w/ pre-aligner
- Rev. 4.2 Software
- Windows NT OS
- MicroHead IIsr Head Assy.
- 8"-wafer or below sample size
- 0.5Å (0.002min.) Resolution
- Vertical range up to 300µm