JEOL JWS-7505
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- Review Scanning Electron Microscope (CD SEM)
- Vintage: 1995
- Able to communicate with KLA 2552
- Currently set up for 8" wafers
- 5" & 6" wafer capable
- Autoloader
- Stage Tilt -15° to 60°, Rotation 360°, & Z:fixed
- Resolution: 8nm (@ accelerating voltage of 1kV)
- Magnification: x100 to 200,000 (on the CRT display)
- Std. Measurement functions include line width, pitch &
   hole measurement, and pitch calibration.
- Accelerating Voltage:
- 0.5kV to 3kV in 10V steps
- 3kV to 6kV in 100V steps

- Refurbishment & Installation Available


Download Sales Flyer (.pdf)